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    Structural origins of intrinsic stress in amorphous silicon thin films

    Structural origins of intrinsic stress in amorphous silicon thin films by Johlin, Eric Carl, Castro-Galnares, Sebastián, Bertoni, Mariana I., Grossman, Jeffrey C., Buonassisi, Tonio, Tabet, Nouar, Abdallah, Amir, Asafa, Tesleem, Said, Syed

    Published 2012
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