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New Heteroleptic Germanium Precursors for GeO2 Thin Films by Atomic Layer Deposition by Heenang Choi, Chanwoo Park, Sung Kwang Lee, Ji Yeon Ryu, Seung Uk Son, Taeyong Eom, Taek-Mo Chung
Published 2023-11-01
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Area-selective atomic layer deposition on 2D monolayer lateral superlattices by Jeongwon Park, Seung Jae Kwak, Sumin Kang, Saeyoung Oh, Bongki Shin, Gichang Noh, Tae Soo Kim, Changhwan Kim, Hyeonbin Park, Seung Hoon Oh, Woojin Kang, Namwook Hur, Hyun-Jun Chai, Minsoo Kang, Seongdae Kwon, Jaehyun Lee, Yongjoon Lee, Eoram Moon, Chuqiao Shi, Jun Lou, Won Bo Lee, Joon Young Kwak, Heejun Yang, Taek-Mo Chung, Taeyong Eom, Joonki Suh, Yimo Han, Hu Young Jeong, YongJoo Kim, Kibum Kang
Published 2024-03-01
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