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    Energy-Efficient Annealing Process of Ferroelectric Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Capacitor Using Ultraviolet-LED for Green Manufacturing

    Energy-Efficient Annealing Process of Ferroelectric Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Capacitor Using Ultraviolet-LED for Green Manufacturing by Hirotaka Yamada, Satoru Furue, Takehiko Yokomori, Yuki Itoya, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    Published 2024-01-01
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