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Study of Finishing of Wafers by Magnetic Field-Assisted Finishing by Hitomi YAMAGUCHI, Kazuki YUMOTO, Takeo SHINMURA, Takahiko OKAZAKI
Published 2009-02-01
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Micro-Machining Characteristics in High-Speed Magnetic Abrasive Finishing for Fine Ceramic Bar by Joonhyuk Song, Takeo Shinmura, Sang Don Mun, Minyoung Sun
Published 2020-04-01
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