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    High Hall-Effect Mobility of Large-Area Atomic-Layered Polycrystalline ZrS<sub>2</sub> Film Using UHV RF Magnetron Sputtering and Sulfurization

    High Hall-Effect Mobility of Large-Area Atomic-Layered Polycrystalline ZrS<sub>2</sub> Film Using UHV RF Magnetron Sputtering and Sulfurization by Masaya Hamada, Kentaro Matsuura, Takuro Sakamoto, Iriya Muneta, Takuya Hoshii, Kuniyuki Kakushima, Kazuo Tsutsui, Hitoshi Wakabayashi

    Published 2019-01-01
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