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Thermal Nanoimprint Lithography—A Review of the Process, Mold Fabrication, and Material by Noriyuki Unno, Tapio Mäkelä
Published 2023-07-01
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Thermal roll-to-roll nanoimprinting using a replica mold without release agent by Noriyuki UNNO, Shohei KAKIMOTO, Tapio MÄKELÄ, Shin HIWASA, Jun TANIGUCHI
Published 2018-10-01
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