Showing 1 - 3 results of 3 for search 'Tarmo Nieminen', query time: 0.02s Refine Results
  1. 1
    Detection of In-Plane Movement in Electrically Actuated Microelectromechanical Systems Using a Scanning Electron Microscope

    Detection of In-Plane Movement in Electrically Actuated Microelectromechanical Systems Using a Scanning Electron Microscope by Tarmo Nieminen, Nikhilendu Tiwary, Glenn Ross, Mervi Paulasto-Kröckel

    Published 2023-03-01
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  2. 2
    In‐Plane AlN‐Based Actuator: Toward a New Generation of Piezoelectric MEMS

    In‐Plane AlN‐Based Actuator: Toward a New Generation of Piezoelectric MEMS by Kristina Bespalova, Tarmo Nieminen, Artem Gabrelian, Glenn Ross, Mervi Paulasto‐Kröckel

    Published 2023-12-01
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  3. 3
    In‐Plane AlN‐based Actuator: Toward a New Generation of Piezoelectric MEMS

    In‐Plane AlN‐based Actuator: Toward a New Generation of Piezoelectric MEMS by Kristina Bespalova, Tarmo Nieminen, Artem Gabrelian, Glenn Ross, Mervi Paulasto‐Kröckel

    Published 2023-08-01
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