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POSSIBILITY OF THE METASTABLE Al2O3 PHASE FORMATION Al3Si IN COMPOSITE Al-Si FILMS OBTAINED BY ION-BEAM AND MAGNETRON SPUTTERING by Vladimir A. Terekhov, Darya S. Usoltseva, Oleg V. Serbin, Igor’ E. Zanin, Tatyana V. Kulikova, Dmitrij N. Nesterov, Konstantin A. Barkov, Aleksandr V. Sitnikov, Sergey K. Lazaruk, Evelina P. Domashevskaja
Published 2018-03-01Article