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    300-KHZ PULSE PLASMA-ETCHING OF GAAS USING A MIXTURE OF CICH3 AND H2

    300-KHZ PULSE PLASMA-ETCHING OF GAAS USING A MIXTURE OF CICH3 AND H2 by Law, V, Tewordt, M, Clary, D, Jones, G

    Published 1993
    Conference item

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