Showing 1 - 3 results of 3 for search 'Thomas Ahbe', query time: 0.02s Refine Results
  1. 1
    True 3D Nanometrology: 3D-Probing with a Cantilever-Based Sensor

    True 3D Nanometrology: 3D-Probing with a Cantilever-Based Sensor by Jan Thiesler, Thomas Ahbe, Rainer Tutsch, Gaoliang Dai

    Published 2021-12-01
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  2. 2
    Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements

    Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements by Min Xu, Ziqi Zhou, Thomas Ahbe, Erwin Peiner, Uwe Brand

    Published 2022-02-01
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  3. 3
    Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm

    Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm by Uwe Brand, Min Xu, Lutz Doering, Jannick Langfahl-Klabes, Heinrich Behle, Sebastian Bütefisch, Thomas Ahbe, Erwin Peiner, Stefan Völlmeke, Thomas Frank, Bodo Mickan, Ilia Kiselev, Michael Hauptmannl, Michael Drexel

    Published 2019-03-01
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