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  1. 1
    Interplay of Precursor and Plasma for The Deposition of HfO2 via PEALD: Film Growth and Dielectric Properties

    Interplay of Precursor and Plasma for The Deposition of HfO2 via PEALD: Film Growth and Dielectric Properties by Florian Preischel, David Zanders, Thomas Berning, Aleksander Kostka, Detlef Rogalla, Claudia Bock, Anjana Devi

    Published 2023-10-01
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  2. 2
    Nucleation and growth studies of large-area deposited WS2 on flexible substrates

    Nucleation and growth studies of large-area deposited WS2 on flexible substrates by Thomas Berning, Malte Becher, Jan-Lucas Wree, Julia Jagosz, Aleksander Kostka, Andreas Ostendorf, Anjana Devi, Claudia Bock

    Published 2022-01-01
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