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Slurry flow visualisation of chemical mechanical polishing based on a computational fluid dynamics model by Tian, Y. B., Lai, S. T., Zhong, Z. W.
Published 2013
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Optimization of the chemical mechanical polishing process for optical silicon substrates by Zhong, Z. W., Tian, Y. B., Ang, Y. J., Wu, H.
Published 2013
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Journal Article