Showing 1 - 6 results of 6 for search 'Tomi T. Li', query time: 0.03s
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Wire-arc spray directed energy deposition: Correlation of chamber kits refurbishing and particle defects reduction in Ta/TaN thin-film physical deposition processes by Shang-Shian Yang, Hong-Lin Lai, Chih-Chia Chen, Shao-Tse Lu, Yu-Min Dai, Wen-Cheng Cheng, Yiin-Kuen Fuh, Tomi T. Li
Published 2024-05-01
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Impact of Pulse Parameters of a DC Power Generator on the Microstructural and Mechanical Properties of Sputtered AlN Film with In-Situ OES Data Analysis by Wei-Yu Zhou, Hsuan-Fan Chen, Xue-Li Tseng, Hsiao-Han Lo, Peter J. Wang, Ming-Yu Jiang, Yiin-Kuen Fuh, Tomi T. Li
Published 2023-04-01
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