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Asymmetric line edge roughness of multilayer grating reference materials by Xingrui Wang, Xinbin Cheng, Longfei Zhang, Xiao Deng, Tongbao Li
Published 2018-03-01
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Sub-5 nm AFM Tip Characterizer Based on Multilayer Deposition Technology by Ziruo Wu, Yingfan Xiong, Lihua Lei, Wen Tan, Zhaohui Tang, Xiao Deng, Xinbin Cheng, Tongbao Li
Published 2022-09-01
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