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    Optical nanolithography with λ/15 resolution using bowtie aperture array

    Optical nanolithography with λ/15 resolution using bowtie aperture array by Wen, Xiaolei, Srisungsitthisunti, Pornsak, Xu, Xianfan, Traverso, Luis M., Moon, Euclid Eberle

    Published 2016
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