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  1. 1
    Analysis of a novel 3C-SiC thin layer on silicon diaphragms for enhanced stress amplification in MEMS piezoresistive pressure sensors

    Analysis of a novel 3C-SiC thin layer on silicon diaphragms for enhanced stress amplification in MEMS piezoresistive pressure sensors por Nguyen Chi Cuong, Trinh Xuan Thang, Lam Minh Thinh, Vuong Dinh Duy Phuc, Truong Huu Ly, Ngo Vo Ke Thanh, Le Quoc Cuong

    Publicado 2024-09-01
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  2. 2
    Effects of humidity and temperature on quality factor of micro-beam resonators in atmospheric pressure and gas rarefaction

    Effects of humidity and temperature on quality factor of micro-beam resonators in atmospheric pressure and gas rarefaction por Nguyen Chi Cuong, Trinh Xuan Thang, Lam Minh Thinh, Vuong Dinh Duy Phuc, Phan Minh Truong, Truong Huu Ly, Ngo Vo Ke Thanh, Le Quoc Cuong

    Publicado 2024-03-01
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