Study of the Fabrication Technology of Hybrid Microfluidic Biochips for Label-Free Detection of Proteins by Nikita Sitkov, Tatiana Zimina, Alexey Kolobov, Evgeny Sevostyanov, Valentina Trushlyakova, Viktor Luchinin, Alexander Krasichkov, Oleg Markelov, Michael Galagudza, Dmitry Kaplun

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