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    Atomic Layer Deposition of Superconducting CuO Thin Films on Three-Dimensional Substrates

    Atomic Layer Deposition of Superconducting CuO Thin Films on Three-Dimensional Substrates by Aile Tamm, Aivar Tarre, Valeriy Verchenko, Helina Seemen, Raivo Stern

    Published 2020-07-01
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