Highly sensitive and robust 3C-SiC/Si pressure sensor with stress amplification structure by Braiden Tong, Tuan-Hung Nguyen, Hong-Quan Nguyen, Tuan-Khoa Nguyen, Thanh Nguyen, Toan Dinh, Ngo Vo Ke Thanh, Truong Huu Ly, Nguyen Chi Cuong, Hoang Ba Cuong, Trinh Xuan Thang, Van Thanh Dau, Dzung Viet Dao

Get full text