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    Versatile Zirconium Oxide (ZrO<sub>2</sub>) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography

    Versatile Zirconium Oxide (ZrO<sub>2</sub>) Sol-Gel Development for the Micro-Structuring of Various Substrates (Nature and Shape) by Optical and Nano-Imprint Lithography by Nicolas Crespo-Monteiro, Arnaud Valour, Victor Vallejo-Otero, Marie Traynar, Stéphanie Reynaud, Emilie Gamet, Yves Jourlin

    Published 2022-08-01
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