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Conditions for Minimizing the Computational Complexity of the RCWA Calculation of the Diffraction Efficiency of Sawtooth Two-Layer Double-Relief Microstructures by Grigoriy I. Greisukh, Artem I. Antonov, Evgeniy G. Ezhov, Viktor A. Danilov, Boris A. Usievich
Published 2023-07-01
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