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    Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li<sub>3</sub>PO<sub>4</sub> Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge

    Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li<sub>3</sub>PO<sub>4</sub> Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge by Nikolay Gavrilov, Alexander Kamenetskikh, Petr Tretnikov, Alexey Nikonov, Leonid Sinelnikov, Denis Butakov, Viktor Nikolkin, Andrey Chukin

    Published 2021-12-01
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