Sputtered NbN films for ultrahigh performance superconducting nanowire single-photon detectors by Ilya A. Stepanov, Aleksandr S. Baburin, Danil V. Kushnev, Evgeniy V. Sergeev, Oksana I. Shmonina, Aleksey R. Matanin, Vladimir V. Echeistov, Ilya A. Ryzhikov, Yuri V. Panfilov, Ilya A. Rodionov

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