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    Ni-Al Alloys as Alternative EUV Mask Absorber

    Ni-Al Alloys as Alternative EUV Mask Absorber by Vu Luong, Vicky Philipsen, Eric Hendrickx, Karl Opsomer, Christophe Detavernier, Christian Laubis, Frank Scholze, Marc Heyns

    Published 2018-03-01
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