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    Dynamic Pad Surface Metrology Monitoring by Swing-Arm Chromatic Confocal System

    Dynamic Pad Surface Metrology Monitoring by Swing-Arm Chromatic Confocal System by Chao-Chang A. Chen, Jen-Chieh Li, Wei-Cheng Liao, Yong-Jie Ciou, Chun-Chen Chen

    Published 2020-12-01
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