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High-quality and highly-transparent AlN template on annealed sputter-deposited AlN buffer layer for deep ultra-violet light-emitting diodes by Chia-Yen Huang, Pei-Yu Wu, Kai-Shiang Chang, Yun-Hsiang Lin, Wei-Chih Peng, Yem-Yeu Chang, Jui-Ping Li, Hung-Wei Yen, YewChung Sermon Wu, Hideto Miyake, Hao-Chung Kuo
Published 2017-05-01
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