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    Fabrication of SiNx Thin Film of Micro Dielectric Barrier Discharge Reactor for Maskless Nanoscale Etching

    Fabrication of SiNx Thin Film of Micro Dielectric Barrier Discharge Reactor for Maskless Nanoscale Etching by Qiang Li, Jie Liu, Yichuan Dai, Wushu Xiang, Man Zhang, Hai Wang, Li Wen

    Published 2016-12-01
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