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Design of a beam line for simultaneous dual-beam ion implantation by Shixian Cai, Kedong Wang, Wei Huang, Kai Wang, Matthew J. Easton, Jie Li, Caijie Zhang, Tingru Zhu, Hao Wang, Huilin Ge, Xicheng Xie, Haoyang Lan, Yingjie Li, Guohui Wei, Kun Zhu, Xueqing Yan
Published 2023-07-01
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