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Xin-Peng Geng
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Xin-Peng Geng
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Xin-Peng Geng
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1
Air Annealing Effect on Oxygen Vacancy Defects in Al-doped ZnO Films Grown by High-Speed Atmospheric Atomic Layer Deposition
by
Chia-Hsun Hsu
,
Xin-Peng Geng
,
Wan-Yu Wu
,
Ming-Jie Zhao
,
Xiao-Ying Zhang
,
Pao-Hsun Huang
,
Shui-Yang Lien
Published 2020-10-01
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Article
2
Suppression of Oxygen Vacancy Defects in sALD-ZnO Films Annealed in Different Conditions
by
Ming-Jie Zhao
,
Zhi-Tao Sun
,
Zhi-Xuan Zhang
,
Xin-Peng Geng
,
Wan-Yu Wu
,
Shui-Yang Lien
,
Wen-Zhang Zhu
Published 2020-09-01
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Article
3
Deposition and Characterization of RP-ALD SiO<sub>2</sub> Thin Films with Different Oxygen Plasma Powers
by
Xiao-Ying Zhang
,
Yue Yang
,
Zhi-Xuan Zhang
,
Xin-Peng Geng
,
Chia-Hsun Hsu
,
Wan-Yu Wu
,
Shui-Yang Lien
,
Wen-Zhang Zhu
Published 2021-04-01
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Article
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