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Development of Temperature Sensor Based on AlN/ScAlN SAW Resonators by Min Wei, Yan Liu, Yuanhang Qu, Xiyu Gu, Yilin Wang, Wenjuan Liu, Yao Cai, Shishang Guo, Chengliang Sun
Published 2023-09-01
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Preparation, Characterization, and Application of AlN/ScAlN Composite Thin Films by Laixia Nian, Yuanhang Qu, Xiyu Gu, Tiancheng Luo, Ying Xie, Min Wei, Yao Cai, Yan Liu, Chengliang Sun
Published 2023-02-01
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Effects of Electric Bias on Different Sc-Doped AlN-Based Film Bulk Acoustic Resonators by Yaxin Wang, Yang Zou, Chao Gao, Xiyu Gu, Ye Ma, Yan Liu, Wenjuan Liu, Jeffrey Bo Woon Soon, Yao Cai, Chengliang Sun
Published 2022-07-01
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