Low‐temperature SOI SiGe/Si superlattice FinFET with omega‐shaped channel and self‐allied silicide for 3D sequential IC Autor Xu‐Lei Qin, Guan‐Qiao Sang, Lei Cao, Qing‐Kun Li, Ren‐Jie Jiang, Yan‐Zhao Wei, Jun‐Feng Li, Jia‐Xin Yao, Mei‐He Zhang, Qing‐Zhu Zhang, Hua‐Xiang Yin

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