Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array by Xueying Xiu, Haolin Yang, Meilin Ji, Haochen Lv, Songsong Zhang

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Bimorph Dual-Electrode ScAlN PMUT with Two Terminal Connections by Meilin Ji, Haolin Yang, Yongxin Zhou, Xueying Xiu, Haochen Lv, Songsong Zhang

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Miniature Ultrasonic Spatial Localization Module in the Lightweight Interactive by Lieguang Li, Xueying Xiu, Haochen Lyu, Haolin Yang, Ahmad Safari, Songsong Zhang

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AlScN Film Based Piezoelectric Micromechanical Ultrasonic Transducer for an Extended Long-Range Detection by Haolin Yang, Meilin Ji, Xueying Xiu, Haochen Lv, Alex Gu, Songsong Zhang

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