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High-efficiency planarization method combining mechanical polishing and atmospheric-pressure plasma etching for hard-to-machine semiconductor substrates by Yasuhisa SANO, Kousuke SHIOZAWA, Toshiro DOI, Syuhei KUROKAWA, Hideo AIDA, Tadakazu MIYASHITA, Kazuto YAMAUCHI
Published 2016-01-01
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Characterization of temporal coherence of hard X-ray free-electron laser pulses with single-shot interferograms by Taito Osaka, Takashi Hirano, Yuki Morioka, Yasuhisa Sano, Yuichi Inubushi, Tadashi Togashi, Ichiro Inoue, Kensuke Tono, Aymeric Robert, Kazuto Yamauchi, Jerome B. Hastings, Makina Yabashi
Published 2017-11-01
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