Showing 1 - 9 results of 9 for search 'Yebin You', query time: 0.03s Refine Results
  1. 1
    Determination of Plasma Potential Using an Emissive Probe with Floating Potential Method

    Determination of Plasma Potential Using an Emissive Probe with Floating Potential Method by Chulhee Cho, Sijun Kim, Youngseok Lee, Inho Seong, Wonnyoung Jeong, Yebin You, Minsu Choi, Shinjae You

    Published 2023-03-01
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  2. 2
    Development of a Noninvasive Real-Time Ion Energy Distribution Monitoring System Applicable to Collisional Plasma Sheath

    Development of a Noninvasive Real-Time Ion Energy Distribution Monitoring System Applicable to Collisional Plasma Sheath by Inho Seong, Sijun Kim, Youngseok Lee, Chulhee Cho, Jangjae Lee, Wonnyoung Jeong, Yebin You, Shinjae You

    Published 2022-08-01
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  3. 3
    Characterization of an Etch Profile at a Wafer Edge in Capacitively Coupled Plasma

    Characterization of an Etch Profile at a Wafer Edge in Capacitively Coupled Plasma by Inho Seong, Jinho Lee, Sijun Kim, Youngseok Lee, Chulhee Cho, Jangjae Lee, Wonnyoung Jeong, Yebin You, Shinjae You

    Published 2022-11-01
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  4. 4
    On the Quenching of Electron Temperature in Inductively Coupled Plasma

    On the Quenching of Electron Temperature in Inductively Coupled Plasma by Inho Seong, Si-jun Kim, Youngseok Lee, Chulhee Cho, Wonnyoung Jeong, Yebin You, Minsu Choi, Byeongyeop Choi, Shinjae You

    Published 2023-04-01
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  5. 5
    Contribution of Ion Energy and Flux on High-Aspect Ratio SiO<sub>2</sub> Etching Characteristics in a Dual-Frequency Capacitively Coupled Ar/C<sub>4</sub>F<sub>8</sub> Plasma: Individual Ion Energy and Flux Controlled

    Contribution of Ion Energy and Flux on High-Aspect Ratio SiO<sub>2</sub> Etching Characteristics in a Dual-Frequency Capacitively Coupled Ar/C<sub>4</sub>F<sub>8</sub> Plasma: Indi... by Wonnyoung Jeong, Sijun Kim, Youngseok Lee, Chulhee Cho, Inho Seong, Yebin You, Minsu Choi, Jangjae Lee, Youbin Seol, Shinjae You

    Published 2023-05-01
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  6. 6
    Enhancement of Ar Ion Flux on the Substrate by Heterogeneous Charge Transfer Collision of Ar Atom with He Ion in an Inductively Coupled Ar/He Plasma

    Enhancement of Ar Ion Flux on the Substrate by Heterogeneous Charge Transfer Collision of Ar Atom with He Ion in an Inductively Coupled Ar/He Plasma by Inho Seong, Sijun Kim, Minsu Choi, Woobeen Lee, Wonnyoung Jeong, Chulhee Cho, Yebin You, Youngseok Lee, Youbin Seol, Shinjae You

    Published 2023-08-01
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  7. 7
    Comprehensive Assessments in Bonding Energy of Plasma Assisted Si-SiO<sub>2</sub> Direct Wafer Bonding after Low Temperature Rapid Thermal Annealing

    Comprehensive Assessments in Bonding Energy of Plasma Assisted Si-SiO<sub>2</sub> Direct Wafer Bonding after Low Temperature Rapid Thermal Annealing by Youngseok Lee, Yebin You, Chulhee Cho, Sijun Kim, Jangjae Lee, Minyoung Kim, Hanglim Lee, Youngjun You, Kyungman Kim, ShinJae You

    Published 2022-10-01
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  8. 8
    Refined Appearance Potential Mass Spectrometry for High Precision Radical Density Quantification in Plasma

    Refined Appearance Potential Mass Spectrometry for High Precision Radical Density Quantification in Plasma by Chulhee Cho, Sijun Kim, Youngseok Lee, Wonnyoung Jeong, Inho Seong, Jangjae Lee, Minsu Choi, Yebin You, Sangho Lee, Jinho Lee, Shinjae You

    Published 2022-08-01
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  9. 9
    Characterization of SiO<sub>2</sub> Plasma Etching with Perfluorocarbon (C<sub>4</sub>F<sub>8</sub> and C<sub>6</sub>F<sub>6</sub>) and Hydrofluorocarbon (CHF<sub>3</sub> and C<sub>4</sub>H<sub>2</sub>F<sub>6</sub>) Precursors for the Greenhouse Gas Emissions Reduction

    Characterization of SiO<sub>2</sub> Plasma Etching with Perfluorocarbon (C<sub>4</sub>F<sub>8</sub> and C<sub>6</sub>F<sub>6</sub>) and Hydrofluorocarbon (CHF<sub>3</sub> and C<sub... by Minsu Choi, Youngseok Lee, Yebin You, Chulhee Cho, Wonnyoung Jeong, Inho Seong, Byeongyeop Choi, Sijun Kim, Youbin Seol, Shinjae You, Geun Young Yeom

    Published 2023-08-01
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