Solubility Change Behavior of Fluoroalkyl Ether-Tagged Dendritic Hexaphenol under Extreme UV Exposure by Hyun-Taek Oh, Gayoung Kim, Seok-Heon Jung, Yejin Ku, Jin-Kyun Lee, Kanghyun Kim, Byeong-Gyu Park, Sangsul Lee, Chawon Koh, Tsunehiro Nishi, Hyun-Woo Kim

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