Fabrication of large-area 100 nm-period gratings using achromatic holographic lithography by Yen, Anthony

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Submicron Structures Technology and Research by Anderson, Erik H., Carter, James M., Chu, William, Quek, Hui Meng, Plotnik, Irving, Schattenburg, Mark L., Yen, Anthony T., Smith, Henry I., Ku, Yao-C., Field, S. B., Licini, Jerome C., Meirav, Udi, Park, Samuel L., Scott-Thomas, John H. F., Antoniadis, Dimitri A., Kastner, Marc A., Bagwell, Phillip F., Orlando, Terry P., Ismail, Khalid, Shahidi, Ghavam G., Ajuria, Sergio, Atwater, Harry A., Floro, Jerrold A., Thompson, Carl V., Palmer, Joyce E., Canizares, Claude R.

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Submicron Structures Technology and Research by Anderson, Erik H., Chu, William, Plotnik, Irving, Schattenburg, Mark L., Smith, Henry I., Yen, Anthony T., Warren, Alan C., Antoniadis, Dimitri A., Orlando, Terry P., Melngailis, John, Chou, Stephen Y., Shahidi, Ghavam G., Licini, Jerome C., Scott-Thomas, John H. F., Park, Samuel L., Kastner, Marc A., Atwater, Harry A., Garrison, Stephen M., Palmer, Joyce E., Quek, Hui Meng, Wong, Chee C., Thompson, Carl V., Canizaares, Claude C., Stein, Josephine A., Summa, Deborah A., Paynter, Henry M., Rajchman, Jan A., Tse, Ming K.

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Submicron Structures Technology and Research by Anderson, Erik H., Carter, James M., Chu, William, Komatsu, Kazu, Quek, Hui Meng, Yen, Anthony T., Plotnik, Irving, Schattenburg, Mark L., Smith, Henry I., Akhtar, Salmon, Ku, Yao C., Toth, Markus, Porter, Mark, Antoniadis, Dimitri A., Field, S., Kastner, Marc A., Licini, Jerome C., Meirav, Udi, Park, Samuel L., Scott-Thomas, John H. F., Bagwell, Phillip F., Ismail, Khalid, Orlando, Terry P., Shahidi, Ghavam G., Chou, Stephen Y., Ajuria, Sergio, Atwater, Henry A., Floro, Jerrold A., Garrison, Stephen M., Palmer, Joyce E., Thompson, Carl V., Canizares, Claude R.

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Submicron Structures Technology and Research by Anderson, Erik H., Burkhardt, Martin, Carter, James M., Chu, William, Early, Kathleen R., Ku, Yao-Ching, Quek, Hui Meng, Moel, Alberto, Schattenburg, Mark L., Smith, Henry I., Yen, Anthony T., Plotnik, Irving, Kawata, Hiroaki, Antoniadis, Dimitri A., Field, Stuart B., Kastner, Marc A., Licini, Jerome C., Meirav, Udi, Park, Samuel L., Scott-Thomas, John H. F., Bagwell, Phillip F., Orlando, Terry P., Ismail, Khalid, Meyer, Paul, Shahidi, Ghavam G., The, Siang-Chun, Ajuria, Sergio, Floro, Jerrold A., Thompson, Carl V., III, Palmer, Joyce E., Canizares, Claude R.

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Submicron Structures Technology and Research by Smith, Henry I., Burkhardt, Martin, Carter, James M., Chu, William, Early, Kathleen R., Ghanbari, Reza A., Ku, Yao-Ching, Moel, Alberto, Quek, Hui Meng, Schattenburg, Mark L., The, Siang-Chun, Yen, Anthony T., Lu, Kenneth P., Su, Lisa T-F., Gutierrez, JoAnne M., Tsai, Flora S., Antoniadis, Dimitri A., Carlin, Gregory A., Meyer, Paul G., Shahidi, Ghavam G., Field, Stuart B., Kastner, Marc A., Meirav, Udi, Park, Samuel L., Scott-Thomas, John H. F., Bagwell, Phillip F., Orlando, Terry P., del Alamo, Jesus A., Ismail, Khalid, Liu, C. T., Smith, T. P., Tsui, Daniel, Canizares, Claude R., Floro, Jerold A., Thompson, Carl V.

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Submicron Structures Technology and Research by Smith, Henry I., Burkhardt, Martin, Carter, James M., Chu, William, Early, Kathleen R., Ghanbari, Reza A., Ku, Yao-Ching, Moel, Alberto M., Schattenburg, Mark L., The, Siang-Chun, Yen, Anthony T., Gutierrez, JoAnne M., Lu, Kenneth P., Ng, Lee-Peng, Salyani, Shahir R., Su, Lisa T-F., Tsai, Flora S., Wey, Lead, Antoniadis, Dimitri A., Carlin, Gregory A., Fang, Hao, Hu, Hang, Field, Stuart B., Kastner, Marc A., Park, Samuel L., Scott-Thomas, John H. F., Bagwell, Phillip F., Orlando, Terry P., del Alamo, Jesus A., Ismail, Khalid, Yee, Kenneth, Evans, Keith, Liu, C. T., Shayegan, M., Smith, T. P., Tsui, Daniel, Zhao, Yang, Canizares, Claude R., Floro, Jerrold A., Thompson, Carl V.

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Submicron and Nanometer Structures Technology and Research by Smith, Henry I., Burkhardt, Martin, Carter, James M., Chu, William, Early, Kathleen R., Ghanbari, Reza A., Hector, Scott D., Ku, Yao-Ching, Moel, Alberto M., Rittenhouse, George E., Schattenburg, Mark L., Wong, Vincent V., Yen, Anthony T., Ferrera, Juan, Mondol, Mark K., Ng, Lee-Peng, Tsai, Flora S., Yunus, Sabah, Antoniadis, Dimitri A., Chung, James E., Fang, Hao, Hu, Hang, Su, Lisa T-F., Kastner, Marc A., Kumar, Arvind, Orlando, Terry P., del Alamo, Jesús A., Eugster, Cristopher C., Moon, Euclid E., Shayegan, M., Tsui, Daniel, Zhao, Yang, Chou, Michael T., Choi, Woo-Young, Damask, Jay N., Fonstad, Clifton G., Jr., Haus, Hermann A., Kolodziejski, Leslie A., Wong, Vincent V., Graybeal, John M., Meyerson, Bernard S., Olster, Daniel B., Canizares, Claude R., Fleming, Robert C., Jr., Nenonen, Seppo, Bristowe, Paul D., Carel, Roland, Floro, Jerrold A., Thompson, Carl V., Yee, Kenneth, Ismail, Khalid, Karam, Nasser

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