Showing 1 - 3 results of 3 for search 'Yi-Pei Tsai', query time: 0.02s Refine Results
  1. 1
    Test Pattern Design for Plasma Induced Damage on Inter-Metal Dielectric in FinFET Cu BEOL Processes

    Test Pattern Design for Plasma Induced Damage on Inter-Metal Dielectric in FinFET Cu BEOL Processes by Chi Su, Yi-Pei Tsai, Chrong-Jung Lin, Ya-Chin King

    Published 2020-05-01
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    Article
  2. 2
    Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes

    Correction to: Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes by Yi-Pei Tsai, Ting-Huan Hsieh, Chrong Jung Lin, Ya-Chin King

    Published 2017-11-01
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  3. 3
    Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes

    Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes by Yi-Pei Tsai, Ting-Huan Hsieh, Chrong Jung Lin, Ya-Chin King

    Published 2017-09-01
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    Article

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