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    Single-structure 3-axis Lorentz force magnetometer based on an AlN-on-Si MEMS resonator

    Single-structure 3-axis Lorentz force magnetometer based on an AlN-on-Si MEMS resonator by Cheng Tu, Xu-heng Ou-Yang, Ying-jie Wu, Xiao-sheng Zhang

    Published 2024-05-01
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