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  1. 1
    Artificial-Neural-Network-Driven Innovations in Time-Varying Process Diagnosis of Low-K Oxide Deposition

    Artificial-Neural-Network-Driven Innovations in Time-Varying Process Diagnosis of Low-K Oxide Deposition by Seunghwan Lee, Yonggyun Park, Pengzhan Liu, Muyoung Kim, Hyeong-U Kim, Taesung Kim

    Published 2023-10-01
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  2. 2
    Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD

    Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD by Yonggyun Park, Pengzhan Liu, Seunghwan Lee, Jinill Cho, Eric Joo, Hyeong-U Kim, Taesung Kim

    Published 2023-06-01
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