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    Development of a Flexible MEMS Sensor for Subsonic Flow

    Development of a Flexible MEMS Sensor for Subsonic Flow by Koichi Murakami, Daiki Shiraishi, Shunsuke Mizumi, Yoshiko Oya, Naoto Omura, Takanori Shibata, Yoshiyasu Ichikawa, Masahiro Motosuke

    Published 2022-08-01
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