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    Effects of Oxygen Flows and Annealing Temperatures on Optical, Electrical, and Structural Properties of Co-Sputtered In<sub>2</sub>O<sub>3</sub>-Ga<sub>2</sub>O<sub>3</sub>-Zn Thin Films

    Effects of Oxygen Flows and Annealing Temperatures on Optical, Electrical, and Structural Properties of Co-Sputtered In<sub>2</sub>O<sub>3</sub>-Ga<sub>2</sub>O<sub>3</sub>-Zn Thin... by Yih-Shing Lee, Sheng-Yu Zhao, Yuan-Zhe Lin, Glen Andrew Porter, Tsung-Cheng Tien

    Published 2023-08-01
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