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    A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections

    A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections by JiuJiang Wang, Xin Liu, YuanYu Yu, Yao Li, ChingHsiang Cheng, Shuang Zhang, PengUn Mak, MangI Vai, SioHang Pun

    Published 2021-06-01
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    Article

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