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    Growth of Si-doped AlN on sapphire (0001) via pulsed sputtering

    Growth of Si-doped AlN on sapphire (0001) via pulsed sputtering by Yuya Sakurai, Kohei Ueno, Atsushi Kobayashi, Jitsuo Ohta, Hideto Miyake, Hiroshi Fujioka

    Published 2018-11-01
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