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    SiGe/Si Multi-Quantum-Well Micro-Bolometer Array Design and Fabrication with Heterogeneous Integration

    SiGe/Si Multi-Quantum-Well Micro-Bolometer Array Design and Fabrication with Heterogeneous Integration by Zhong Fang, Yong He, Zhequan Chen, Yunlei Shi, Junjie Jiao, Xuchao Pan

    Published 2021-12-01
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