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    Low-Damage Trimming of Micro Hemispherical Resonators by Chemical Etching

    Low-Damage Trimming of Micro Hemispherical Resonators by Chemical Etching by Zhongzhe Zhou, Kun Lu, Yan Shi, Xiang Xi, Jiangkun Sun, Dingbang Xiao, Xuezhong Wu

    Published 2024-08-01
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