Polymers for high technology : electronics and photonics /
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Washington, D C : American Chemical Society,
1987
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_version_ | 1826376711787249664 |
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author | Bowden, Murrae J., 1943- Turner, S. Richard, 1942- |
author_facet | Bowden, Murrae J., 1943- Turner, S. Richard, 1942- |
author_sort | Bowden, Murrae J., 1943- |
collection | OCEAN |
description | 16 |
first_indexed | 2024-03-04T17:50:37Z |
format | |
id | KOHA-OAI-TEST:107380 |
institution | Universiti Teknologi Malaysia - OCEAN |
last_indexed | 2024-03-04T17:50:37Z |
publishDate | 1987 |
publisher | Washington, D C : American Chemical Society, |
record_format | dspace |
spelling | KOHA-OAI-TEST:1073802020-12-19T17:01:45ZPolymers for high technology : electronics and photonics / Bowden, Murrae J., 1943- Turner, S. Richard, 1942- Washington, D C : American Chemical Society,198716PSZJBLPolymersPhotoresistsMicrolithographyMicroelectronicsURN:ISBN:0841214069 |
spellingShingle | Polymers Photoresists Microlithography Microelectronics Bowden, Murrae J., 1943- Turner, S. Richard, 1942- Polymers for high technology : electronics and photonics / |
title | Polymers for high technology : electronics and photonics / |
title_full | Polymers for high technology : electronics and photonics / |
title_fullStr | Polymers for high technology : electronics and photonics / |
title_full_unstemmed | Polymers for high technology : electronics and photonics / |
title_short | Polymers for high technology : electronics and photonics / |
title_sort | polymers for high technology electronics and photonics |
topic | Polymers Photoresists Microlithography Microelectronics |
work_keys_str_mv | AT bowdenmurraej1943 polymersforhightechnologyelectronicsandphotonics AT turnersrichard1942 polymersforhightechnologyelectronicsandphotonics |