Polymers for high technology : electronics and photonics /

Detalhes bibliográficos
Main Authors:	Bowden, Murrae J., 1943-, Turner, S. Richard, 1942-
Formato:
Publicado em:	Washington, D C : American Chemical Society, 1987
Assuntos:	Polymers Photoresists Microlithography Microelectronics

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