Ion implantation in semiconductors : silicon and germanium/

Ion implantation in semiconductors : silicon and germanium/

40

Bibliographic Details
Main Authors: Mayer, James W., 1930-, Eriksson, Lennart, Davies, John A.
Format:
Published: New York : Academic Pr., 1970
Subjects:
Semiconductors
Ion implantation
Description
Summary:40

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