Ion implantation in semiconductors : silicon and germanium/
40
| Main Authors: | , , |
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| Format: | |
| Published: |
New York : Academic Pr.,
1970
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| Subjects: |
| _version_ | 1796667824918233088 |
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| author | Mayer, James W., 1930- Eriksson, Lennart Davies, John A. |
| author_facet | Mayer, James W., 1930- Eriksson, Lennart Davies, John A. |
| author_sort | Mayer, James W., 1930- |
| collection | OCEAN |
| description | 40 |
| first_indexed | 2024-03-04T18:07:09Z |
| format | |
| id | KOHA-OAI-TEST:112863 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-04T18:07:09Z |
| publishDate | 1970 |
| publisher | New York : Academic Pr., |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:1128632020-12-19T17:01:59ZIon implantation in semiconductors : silicon and germanium/ Mayer, James W., 1930- Eriksson, Lennart Davies, John A. New York : Academic Pr.,19704012PSZJBLSemiconductorsIon implantationURN:ISBN:0124808506 |
| spellingShingle | Semiconductors Ion implantation Mayer, James W., 1930- Eriksson, Lennart Davies, John A. Ion implantation in semiconductors : silicon and germanium/ |
| title | Ion implantation in semiconductors : silicon and germanium/ |
| title_full | Ion implantation in semiconductors : silicon and germanium/ |
| title_fullStr | Ion implantation in semiconductors : silicon and germanium/ |
| title_full_unstemmed | Ion implantation in semiconductors : silicon and germanium/ |
| title_short | Ion implantation in semiconductors : silicon and germanium/ |
| title_sort | ion implantation in semiconductors silicon and germanium |
| topic | Semiconductors Ion implantation |
| work_keys_str_mv | AT mayerjamesw1930 ionimplantationinsemiconductorssiliconandgermanium AT erikssonlennart ionimplantationinsemiconductorssiliconandgermanium AT daviesjohna ionimplantationinsemiconductorssiliconandgermanium |