APA (7th ed.) Citation

Ehrlich, D. J., & Tsao, J. Y. (1989). Laser microfabrication: Thin film processes and lithography. San Diego, Calif. : Academic Pr..

Chicago Style (17th ed.) Citation

Ehrlich, Daniel J., and Jeffrey Y. Tsao. Laser Microfabrication: Thin Film Processes and Lithography. San Diego, Calif. : Academic Pr., 1989.

MLA (9th ed.) Citation

Ehrlich, Daniel J., and Jeffrey Y. Tsao. Laser Microfabrication: Thin Film Processes and Lithography. San Diego, Calif. : Academic Pr., 1989.

Warning: These citations may not always be 100% accurate.