Ehrlich, D. J., & Tsao, J. Y. (1989). Laser microfabrication: Thin film processes and lithography. San Diego, Calif. : Academic Pr..
Chicago Style (17th ed.) CitationEhrlich, Daniel J., and Jeffrey Y. Tsao. Laser Microfabrication: Thin Film Processes and Lithography. San Diego, Calif. : Academic Pr., 1989.
MLA (9th ed.) CitationEhrlich, Daniel J., and Jeffrey Y. Tsao. Laser Microfabrication: Thin Film Processes and Lithography. San Diego, Calif. : Academic Pr., 1989.
Warning: These citations may not always be 100% accurate.